Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE/ASME Transactions on Mechatronics
سال: 2013
ISSN: 1083-4435,1941-014X
DOI: 10.1109/tmech.2012.2194161